Method and IC Design with Non-Linear Power Rails

ABSTRACT

The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC layout having active regions, conductive contact features landing on the active regions, and a conductive via feature to be landing on a first subset of the conductive contact features and to be spaced from a second subset of the conductive contact features; evaluating a spatial parameter of the conductive via feature to the conductive contact features; and modifying the IC layout according to the spatial parameter such that the conductive via feature has a S-curved shape.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased.

ICs may include a plurality of standard cell circuits each formed byvarious logic components, such as transistors, capacitors, or the like,to provide a Boolean logic function or a storage function. Interconnectstructures, such as vias and power rails, are then formed over theplurality of standard cell circuits to provide connections between thestandard cell circuits and/or to provide connections to externaldevices. However, as the size of standard cells progressively becomesmaller, gaps and clearance between the power rails and the otherelectronic components may decrease which may increase the risk ofshorting. Attempts to reduce the size of the power rails, however, maysuffer from increased resistance and may induce speed degradation.Accordingly, what is needed is a circuit structure and a method ofmaking the same to address the above issues.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1A is a top view of a semiconductor structure in accordance withsome embodiments.

FIGS. 1B and 1C are sectional views of the semiconductor structure ofFIG. 1A, along AA′ and BB′ dashed lines, respectively, in accordancewith some embodiments.

FIG. 2A is a top view of a semiconductor structure in accordance withsome embodiments.

FIGS. 2B and 2C are sectional views of the semiconductor structure ofFIG. 2A, along AA′ and BB′ dashed lines, respectively, in accordancewith some embodiments.

FIG. 3A is a top view of a semiconductor structure in accordance withsome embodiments.

FIGS. 3B and 3C are sectional views of the semiconductor structure ofFIG. 3A, along AA′ and BB′ dashed lines, respectively, in accordancewith some embodiments.

FIG. 4 is a top view of the semiconductor structure of FIG. 3A, inportion, constructed according to some embodiments.

FIGS. 5A, 5B, 5C and 5D are sectional views of a conductive via featurein the semiconductor structure of FIG. 4 in accordance with someembodiments.

FIGS. 6A, 6B, 6C, 6D and 6E are sectional views of the conductive viafeature in the semiconductor structure of FIG. 4 at various fabricationstages, constructed in accordance with some embodiments.

FIG. 7 is a flowchart of an integrated circuit fabrication method inaccordance with some embodiments.

FIGS. 8A, 8B, 8C, 8D and 8E are sectional views of the conductive viafeature in the semiconductor structure of FIG. 4 at various fabricationstages, constructed in accordance with some embodiments.

FIG. 9 is a flowchart of an integrated circuit fabrication method inaccordance with some embodiments.

FIG. 10 is a flowchart of an integrated circuit fabrication method inaccordance with some other embodiments.

FIGS. 11A, 11B and 11C are sectional views of the conductive via featurein the semiconductor structure of FIG. 4 at various fabrication stages,constructed in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. For example, if the device in the figures is turned over,elements described as being “below” or “beneath” other elements orfeatures would then be oriented “above” the other elements or features.Thus, the exemplary term “below” can encompass both an orientation ofabove and below. The apparatus may be otherwise oriented (rotated 90degrees or at other orientations) and the spatially relative descriptorsused herein may likewise be interpreted accordingly.

The present disclosure is directed to, but not otherwise limited to, afield-effect transistor (FET) device. The FET device, for example, maybe a complementary metal-oxide-semiconductor (CMOS) device including aP-type metal-oxide-semiconductor (PMOS) FET device and an N-typemetal-oxide-semiconductor (NMOS) FET device. The FET may betwo-dimensional (planar FET) or three-dimensional, such as a fin-typeFET (FinFET). The following disclosure will continue with a FinFETexample to illustrate various embodiments of the present invention. Itis understood, however, that the application should not be limited to aparticular type of device, except as specifically claimed.

FIG. 1A is a top view of a semiconductor structure 100; and FIGS. 1B and1C are sectional views of the semiconductor structure 100 along AA′ andBB′ directions, respectively, constructed in accordance with someembodiments. The semiconductor structure 100 includes a semiconductorsubstrate having various active regions (such as 102A and 102B)separated by isolation features 103. Various devices, such as FETs areformed on the active regions. Each of the active regions includes anelongated shape, such as rectangle, oriented in a first direction (Xdirection). Various gate stacks, such as gate stacks 104A, 104B 104C and104D, for FETs are formed on the active regions. Each of the gate stacksincludes an elongated shape, such as rectangle, oriented in a seconddirection (Y direction) that is perpendicular to the first direction.The vertical direction is Z direction, which is perpendicular to thesurface of the semiconductor substrate, defined by XY plane. Varioussource/drain features (not shown) are formed on the fin active regionsand are configured with respective gate stacks to form FETs. Thesemiconductor structure 100 further includes conductive features (alsoreferred to as conductive contact features) 106 formed on thesemiconductor substrate and configured to land on the source/drainfeatures. In the present example, the conductive contact features 106include exemplary conductive contact features 106A, 106B, 106C, 106D,106E and 106F. In furtherance of the present example, the conductivecontact features 106A, 106B and 106C land on and directly contactrespective source/drain features on the active region 102A, while theconductive contact features 106D, 106E and 106F land on and directlycontact respective source/drain features on the active region 102B. Aconductive feature (referred to as conductive via feature) 108 isdisposed on the semiconductor substrate and is configured to directlyconnect to the conductive contact features 106A, 106C and 106E. Theconductive via feature 108 is a power rail configured to provide power(such as a high power Vdd or a low power Vss) to source/drain featuresin the semiconductor substrate. Additional interconnection structure,including various metal lines and via features, is formed on thesemiconductor substrate and is configured to couple various FETs into afunctional circuit. Particularly, the interconnection structure includesa metal line 110 configured to land on the conductive via feature 108,as illustrated in FIG. 1B.

FIG. 2A is a top view of a semiconductor structure 200; and FIGS. 2B and2C are sectional views of the semiconductor structure 100 along AA′ andBB′ directions, respectively, constructed in accordance with someembodiments. The semiconductor structure 200 includes a semiconductorsubstrate having various active regions (such as 102A and 102B)separated by isolation features 103. Various devices, such as FETs areformed on the active regions. Each of the active regions includes anelongated shape, such as rectangle, oriented in a first direction (Xdirection). Various gate stacks, such as gate stacks 104A, 104B 104C and104D, for FETs are formed on the active regions. Each of the gate stacksincludes an elongated shape, such as rectangle, oriented in a seconddirection (Y direction) that is perpendicular to the first direction.The vertical direction is Z direction, which is perpendicular to thesurface of the semiconductor substrate, defined by XY plane. Varioussource/drain features (not shown) are formed on the fin active regionsand are configured with respective gate stacks to form FETs. Thesemiconductor structure 200 further includes conductive contact features106 formed on the semiconductor substrate and configured to land on thesource/drain features. In the present example, the conductive contactfeatures 106 include exemplary conductive contact features 106A, 106B,106C, 106D, 106E and106F. In furtherance of the present example, theconductive contact features 106A, 106B and 106C land on and directlycontact respective source/drain features on the active region 102A,while the conductive contact features 106D, 106E and 106F land on anddirectly contact respective source/drain features on the active region102B. Three exemplary conductive via features 208A, 208B and 208C areformed on the semiconductor substrate and are configured to connect tothe conductive contact features 106A, 106E and 106C, respectively. Theconductive via features 208 are power rails configured to provide power(such as a high power Vdd or a low power Vss) to source/drain featuresin the semiconductor substrate. Additional interconnection structure,including various metal lines and via features, is formed on thesemiconductor substrate and is configured to couple various FETs into afunctional circuit. Particularly, the interconnection structure includesa metal line 110 configured to land on and electrically connect to theconductive via features 208A, 208B and 208C, as illustrated in FIG. 2B.

FIG. 3A is a top view of a semiconductor structure 300; and FIGS. 3B and3C are sectional views of the semiconductor structure 300 along AA′ andBB′ directions, respectively, constructed in accordance with someembodiments. The semiconductor structure 300 includes a semiconductorsubstrate having various active regions (such as 102A and 102B)separated by isolation features 103. Various devices, such as FETs areformed on the active regions. Each of the active regions includes anelongated shape, such as rectangle, oriented in a first direction (Xdirection). Various gate stacks, such as gate stacks 104A, 104B 104C and104D, for FETs are formed on the active regions. Each of the gate stacksincludes an elongated shape, such as rectangle, oriented in a seconddirection (Y direction) that is perpendicular to the first direction.The vertical direction is Z direction, which is perpendicular to thesurface of the semiconductor substrate, defined by XY plane. Varioussource/drain features (not shown) are formed on the fin active regionsand are configured with respective gate stacks to form FETs. Thesemiconductor structure 300 further includes conductive contact features106 formed on the semiconductor substrate and configured to land on thesource/drain features. In the present example, the conductive contactfeatures 106 include exemplary conductive contact features 106A, 106B,106C, 106D, 106E and106F. In furtherance of the present example, theconductive contact features 106A, 106B and 106C land on and directlycontact respective source/drain features on the active region 102A,while the conductive contact features 106D, 106E and 106F land on anddirectly contact respective source/drain features on the active region102B. A curved conductive via feature 308 is formed on the semiconductorsubstrate and is configured to connect to the conductive contactfeatures 106A, 106E and 106C, respectively. Particularly, the conductivevia feature 308 is designed to have an S-curved shape. The S-curvedshape includes at least one edge oriented in a tilted direction, whichis different from the first and second directions (X and Y directions).This design with S-curved shape having a tilted edge provides aconductive structure to properly connect to intended conductive contactfeatures with enough contact area (overlapping target) and to distancefrom unintended conductive contact features with enough clearance(spacing target). The conductive via feature 308 is a power railconfigured to provide power (such as a high power Vdd or a low powerVss) to source/drain features in the semiconductor substrate. Additionalinterconnection structure, including various metal lines and viafeatures, is formed on the semiconductor substrate and is configured tocouple various FETs into a functional circuit. Particularly, theinterconnection structure includes a metal line 110 configured to landon the conductive via feature 308, as illustrated in FIG. 3B.

The semiconductor structure 300 is further constructed in portion inFIG. 4 while the active regions 102 and the metal line 110 areeliminated for simplicity. In the present embodiment, the metal contactfeatures 106 are divided to two groups (or two subsets) according to therelationship to the conductive via feature 308. The first group of theconductive contact features includes conductive contact features 106A,106C and 106E, those being intended to be directly connected to theconductive via feature 308 according to the design. The second group ofthe conductive contact features includes conductive contact features106B, 106D and 106F, those being intended to be distanced from theconductive via feature 308 according to the design. The S-curved shapeof the conductive via feature 308 is a continuous feature with variousshifting and deformation to have proper relationships to the two groupsof the conductive contact features. The conductive via feature 308having the S-curved shape is constructed according to various rules,which will be described later, to land on the first group of theconductive contact features satisfying the overlapping target and bedistanced from the second group of the conductive contact featuressatisfying the spacing target. To achieve this, the S-curved shapeincludes various polygons, such as squares with different sizes,rectangles with different widths and lengths, tilted rectangles withdifferent angles, triangles, trapezoids, diamonds, and parallelograms.Various exemplary S-curved shapes of the conductive via feature 308 areillustrated in FIGS. 5A, 5B, 5C and 5D in accordance with someembodiments. Usually, the original IC design from the designer cannotmeet those criteria (such as the overlapping target and spacing target)due to not knowing enough of the manufacturing capability andun-efficiency of the communication between the designers andmanufacture. The following method provides a proper way to modify the ICdesign to meet the manufacturing rules.

FIG. 7 provides a flowchart 700 for constructing the conductive viafeature 308 according to some embodiments with the abstract rules. FIGS.6A, 6B, 6C, 6D and 6E are the shapes of the conductive via feature 308at various steps. In the following description, the IC design of thesemiconductor structure 100 still use the IC design in FIGS. 3A-3C andFIG. 4 for various features (including active regions 102, gate stacks104 and other features) and respective spatial relationships.

Referring to FIG. 7, the method 700 begins at a block 701 by receivingan IC layout for a semiconductor structure having multiple patternlayers, such as those illustrated in FIGS. 3A-3C. For examples, the IClayout includes a first pattern layer defining active regions 102; asecond pattern layer defining gate stacks 104; a third pattern layerdefining conductive contact features 106 landing on respective activeregions; and a fourth pattern layer defining a conductive via feature308 landing on a subset (or the first group) of the conductive contactfeatures 106. Additional pattern layers may present in the IC layout.For example, an interconnection structure, including various metal linesand via features in respective pattern layers, is formed on thesemiconductor substrate and is configured to couple various FETs into afunctional circuit.

Referring to FIGS. 7 and 6A, the method 700 proceeds to an operation 702by constructing the conductive via feature having a rectangle with alength and a width to land on all conductive contact features satisfyingthe overlapping target. In the present example, the rectangle isoriented with its length in the first direction (X direction), asillustrated in FIG. 6A. This rectangle is referred to as an initialrectangle.

Referring to FIGS. 7 and 6B, the method 700 proceeds to an operation 704by considering one conductive contact feature from the second group, andabstracting a polygon from the initial rectangle. Especially, theabstraction of the polygon is from the location of the overlappingregion between the initial rectangle of the conductive via feature andthe considered conductive contact feature. The dimensions of the polygonmay be evaluated and determined according to certain rules, such as theoverlapping area plus the spacing. The polygon can be a polygon with anynumber of sides, such as a square, a rectangle, a triangle, a trapezoid,a diamonds, and a parallelogram. Edges of the polygon can be in anyangle including a tilted angle different from the X and Y directions.For example, the conductive contact feature 106D is considered and apolygon is abstracted from the overlapping region. In the case, thepolygon is a rectangle. After the abstraction at the operation 704, theshape of the conductive via feature is illustrated in FIG. 6B

Referring to FIG. 7, the method 700 proceeds to an operation 706 byevaluating if a lateral distance (or spacing) between the consideredconductive contact feature (106D in this example) and the conductive viafeature meets the spacing target. If not, move back to the operation 704by abstracting another polygon from the conductive via feature. If itmeets the spacing target, the method 700 moves forward to the followingoperation 708. The method 700 will iterates until the spacing target isreached.

Referring to FIG. 7, the method 700 proceeds to an operation 708 bycheck if all conductive contact features in the second group areexhausted. If not, the method 700 moves back to the operation 704 foranother conductive contact feature in the second group. For example,consider another conductive contact feature 106F in the second group andabstract another polygon (such as a rectangle) from the conductive viafeature, resulting in a curved shape as illustrated in FIG. 6C. Foranother example, consider yet another conductive contact feature 106B inthe second group and abstract another polygon (such as a rectangle) fromthe conductive via feature, resulting in an S-curved shape asillustrated in FIG. 6D. Furthermore, if the spacing target is still notreached yet, another polygon is abstracted from the conductive viafeature 308. For examples, if the conductive contact feature 106D andthe conductive via feature 308 have not enough spacing, another polygon(such as a triangle) is abstracted. For another example, if theconductive contact feature 106F and the conductive via feature 308 havenot enough spacing, another polygon, such as a triangle, is abstracted,and so on, resulting in conductive via feature 308 having an S-curvedshape as illustrated in FIG. 6E. Particularly, the S-curved shape 308 inFIG. 6E has one or more tilted edges, such as edges 602, 604 and othertilted edges, each having a respective tilted angle different from the Xand Y directions.

Referring to FIG. 7, the method 700 may include other operations, suchas an operation 710 to generate a tape-out for mask making according tothus modified IC design, which includes the conductive via feature 308having an S-curved shape, which further has at least one tilted edge.The tape-out defines the modified IC design to be formed on photomasksfor wafer fabrication or to be directly transferred to semiconductorwafers by direct writing techniques, such as electron-beam directwriting. The tape-out of the modified IC design includes various patternlayers (such as a layer of active regions, a layer of gate stacks and soon) and spatial relationships among those pattern layers, especiallyvarious shapes and sizes of various pattern features in each patternlayer. The method 700 may further include making photomasks according tothe tape-out that defines the modified IC design having a conductive viafeature 308 with an S-curved shape.

FIG. 9 provides a flowchart 900 for constructing the conductive viafeature 308 according to some embodiments with the addition rules. FIGS.8A, 8B, 8C, 8D and 8E are the shapes of the conductive via feature 308at various steps. In the following description, the IC design of thesemiconductor structure 100 is still use the IC design in FIGS. 3A-3Cand FIG. 4 for various features (including active regions 102, gatestacks 104 and other features) and respective spatial relationships.

Referring to FIG. 9, the method 900 begins at a block 701 by receivingan IC layout for a semiconductor structure having multiple patternlayers. For examples, the IC layout includes a first pattern layerdefining active regions 102; a second pattern layer defining gate stacks104; a third pattern layer defining conductive contact features landingon respective active regions; and a fourth pattern layer defining aconductive via feature landing on a subset of the conductive contactfeatures, such as those illustrated in FIGS. 3A-3C. Additional patternlayers may present in the IC layout.

Referring to FIGS. 9 and 8A, the method 900 proceeds to an operation 902by constructing the conductive via feature having a rectangle with alength and a width small enough so that not landing on any of theconductive contact features or distancing from any of the conductivecontact features with a lateral distance satisfying the spacing target,which means that the lateral distance is equal to or greater than thespacing target. In the present example, the rectangle is oriented withits length in the first direction (X direction), as illustrated in FIG.8A. This rectangle is referred to as an initial rectangle.

Referring to FIGS. 9 and 8B, the method 900 proceeds to an operation 904by considering one conductive contact feature from the first group, andadding a polygon to the initial rectangle. Especially, the addition ofthe polygon is to the location of the considered conductive contactfeature such that the modified conductive via feature will overlap withthe considered conductive contact feature. The dimensions of the polygonmay be evaluated and determined according to certain rules, such as theexisting spacing plus the overlapping target. The polygon can be apolygon with any number of sides, such as a square, a rectangle, atriangle, a trapezoid, a diamonds, and a parallelogram. Edges of thepolygon can be in any angle including a tilted angle different from theX and Y directions. For example, the conductive contact feature 106A isconsidered and a polygon is added to the conductive via feature. In thecase, the polygon is a rectangle. After the addition at the operation904, the shape of the conductive via feature is illustrated in FIG. 8B

Referring to FIG. 9, the method 900 proceeds to an operation 906 byevaluating if the overlapping area between the considered conductivecontact feature (106A in this example) and the conductive via featuremeets the overlapping target. If not, move back to the operation 904 byadding another polygon to the conductive via feature. If it meets theoverlapping target, the method 900 moves forward to the followingoperation 908 to check if all conductive contact features in the firstgroup are exhausted. The method 900 will iterates until the overlappingtarget is reached.

Referring to FIG. 9, the method 900 proceeds to an operation 908 bycheck if all conductive contact features in the first group areexhausted by the above operations. If not, the method 900 moves back tothe operation 904 for another conductive contact feature in the firstgroup. For example, consider another conductive contact feature 106C inthe first group and add another polygon (such as a rectangle) to theconductive via feature, resulting in a curved shape as illustrated inFIG. 8C. For another example, consider another conductive contactfeature 106E in the first group and add another polygon (such as arectangle) to the conductive via feature, resulting in an S-curved shapeas illustrated in FIG. 8D. Furthermore, if the overlapping target is notreached yet, another polygon is added to the conductive via feature 308.For examples, if the conductive contact feature 106A and the conductivevia feature 308 have not enough contact area, another polygon (such as atrapezoid) is added to the conductive via feature. For another example,if the conductive contact feature 106C and the conductive via feature308 have not enough contact area, another polygon (such as a trapezoid)is added, and so on, resulting in conductive via feature 308 having anS-curved shape as illustrated in FIG. 8E. Particularly, the S-curvedshape 308 in FIG. 8E has one or more tilted edges, such as edges 802,804 and other tilted edges, each having a respective tilted angledifferent from the X and Y directions. The tilted angle of theconductive via feature 308 is generated since a tilted polygon is addedto increase the contact area and also to avoid violate the spacingtarget to the adjacent conductive contact features in the second group.

Referring to FIG. 9, the method 900 may include other operations, suchas an operation 910 to generate a tape-out for mask making according tothus modified IC design, which includes the conductive via featurehaving an S-curved shape, which further has at least one tilted edge.The tape-out defines the modified IC design to be formed on photomasksor to be directly transferred to semiconductor wafers by direct writingtechniques, such as electron-beam direct writing. The tape-out of themodified IC design includes various pattern layers and spatialrelationships among those pattern layers, especially various shapes andsizes of various pattern features in each pattern layer. The method 900may further include making photomasks according to the tape-out thatdefines the modified IC design having a conductive via feature with anS-curved shape.

FIG. 10 provides a flowchart 1000 for constructing the conductive viafeature 308 in accordance with some embodiments. The method 1000 beginsat a block 701 by receiving an IC layout for a semiconductor structurehaving multiple pattern layers. For examples, the IC layout includes afirst pattern layer defining active regions 102; a second pattern layerdefining gate stacks 104; a third pattern layer defining conductivecontact features landing on respective active regions; and a fourthpattern layer defining a conductive via feature landing on a subset ofthe conductive contact features, such as those illustrated in FIGS.3A-3C. Additional pattern layers may present in the IC layout.

The method 1000 proceeds to an operation 1002 by constructing an initialshape of the conductive via feature. The initial shape may be a polygonor other proper shape. The initial shape may be a shape from thedesigner when the initial IC design is received from the designer. Inone embodiment, the operation 1002 constructs the initial shape of theconductive via feature to have a rectangle with a length and a width toland on all conductive contact features satisfying the overlappingtarget. In another embodiment, the operation 1002 constructs the initialshape of the conductive via feature to have a rectangle with a lengthand a width small enough so that not landing on any of the conductivecontact features or distancing from each of the conductive contactfeatures with a lateral distance satisfying the spacing target.

The method 1000 proceeds to an operation 1004 by considering oneconductive contact feature and determine which group it belongs to. Inthe operation 1004, a spatial parameter between the conductive viafeature and the considered conductive contact feature is evaluated. Thisspatial relationship defines if the two are connected or distanced awayaccording to the IC layout. Accordingly, the conductive contact featuresare divided into two groups. The first group includes all conductivecontact features to be contacted with the conductive via feature. Thesecond group includes all conductive contact features to be distancedfrom the conductive via feature. If the considered conductive contactfeature belongs to the first group, proceeds to an operation 1006. If itbelongs to the second group, proceeds to an operation 1008.

At the operation 1004, when the considered conductive contact feature isfrom the first group, the method 1000 proceeds to an operation 1006. Atthe operation 1006, a polygon is added to the conductive via feature.Especially, the addition of the polygon is to the location of theconsidered conductive contact feature such that the modified conductivevia feature will overlap with the considered conductive contact feature.The dimensions of the polygon may be evaluated and determined accordingto certain rules, such as the existing spacing plus the overlappingtarget. The polygon can be a polygon with any number of sides, such as asquare, a rectangle, a triangle, a trapezoid, a diamonds, and aparallelogram. Edges of the polygon can be in any angle including atilted angle different from the X and Y directions. For example, theconductive contact feature 106A is considered and a polygon is added tothe conductive via feature.

The method 1000 proceeds to an operation 1010 by evaluating if theoverlapping area between the considered conductive contact and theconductive via feature meets the overlapping target. If not, move backto the operation 1006 by adding another polygon to the conductive viafeature. The method 1000 will iterates until the overlapping target isreached. If it meets the overlapping target, the method 1000 movesforward to the following operation 1014. In the operations 1006 and1010, the spacing rule may be also considered. When adding a polygoncauses a lateral distance between the conductive via feature 308 and anadjacent conductive contact feature of the second group is reduced, atilted polygon may be added to both meet the overlapping target and thespacing target.

At the operation 1004, when the considered conductive contact featurebelongs to the second group, the method 1000 proceeds to an operation1008. At the operation 1008, a polygon is abstracted from the conductivevia feature. Especially, the abstraction of the polygon is from thelocation of the considered conductive contact feature such that themodified conductive via feature will distanced from the consideredconductive contact feature such that a lateral distance therebetween isequal to or greater than the spacing target. The dimensions of thepolygon may be evaluated and determined according to certain rules, suchas the existing overlapping plus the spacing target. The polygon can bea polygon with any number of sides, such as a square, a rectangle, atriangle, a trapezoid, a diamonds, and a parallelogram. Edges of thepolygon can be in any angle including a tilted angle different from theX and Y directions.

The method 1000 proceeds to an operation 1012 by evaluating if thespacing between the considered conductive contact and the conductive viafeature meets the spacing target. If not, move back to the operation1008 by abstracting another polygon from the conductive via feature. Themethod 1000 will iterates until the spacing target is reached. If itmeets the spacing target, the method 1000 moves forward to the followingoperation 1014. In the operations 1008 and 1012, the overlapping rulemay be also considered. When abstracting a polygon causes an overlappingarea between the conductive via feature 308 and an adjacent conductivecontact feature of the first group is reduced, a tilted polygon may beabstracted to both meet the spacing target and the overlapping target.

The operation 1014 includes checking if all conductive contact features(both in the first group and the second group) are exhausted by theabove operations. If not, the method 1000 moves back to the operation1004 for another conductive contact feature. Thus, the conductive viafeature 308 ends up with an S-curved shape having one or more tiltededges each with a respective tilted angle different from the X and Ydirections.

The method 1000 may include other operations, such as an operation 910to generate a tape-out for mask making according to thus modified ICdesign, which includes a conductive via feature having an S-curvedshape, which further has at least one tilted edge. The tape-out definesthe modified IC design to be formed on photomasks or to be directlytransferred to semiconductor wafers by direct writing techniques, suchas electron-beam direct writing. The tape-out of the modified IC designincludes various pattern layers and spatial relationships among thosepattern layers, especially various shapes and sizes of various patternfeatures in each pattern layer. The method 900 may further includemaking photomasks according to the tape-out that defines the modified ICdesign having a conductive via feature with an S-curved shape. Themethod 900 may further include making semiconductor wafers using thephotomasks.

Various embodiments of an IC design for the semiconductor structure andthe method making the same are provided. Other embodiments may presentwithin the scope of the present disclosure. For example, the method 700may begin with an initial shape, and then adding a polygon to reachanother conductive contact feature in the first group in a way (in termof shape, size, and tilted angle) be distanced away from an adjacentconductive contact features in the second group. This procedure iscontinued until the conductive via feature lands on all conductivecontact features in the first group with enough contact area (meetingthe overlapping target) and is distanced away from all conductivecontact features in the second group with enough spacing (meeting thespacing target). At one step, the exemplary conductive via feature 308is illustrated in FIG. 11A. After adding a few more additional polygons,the exemplary conductive via feature 308 is extended, as illustrated inFIG. 11B. After a few more cycles in the iteration of adding polygon,the exemplary conductive via feature 308 is further extended, asillustrated in FIG. 11C.

The present disclosure provides an IC layout for a semiconductorstructure and a method making the same. The semiconductor structureincludes a conductive via feature landing on a subset of conductivecontact features in the underlying conductive layer to coupling varioussource/drain features of FETs in the active regions. The conductive viafeature in the IC layout for the semiconductor structure is designed tohave an S-curved shape. The S-curved shape includes at least one edgeoriented in a tilted direction, which is different from the standarddirections, such as the orientation of the elongate gate stacks and theorientation of the elongated fin active regions.

The embodiments of the present disclosure offer advantages over existingart, though it is understood that other embodiments may offer differentadvantages, not all advantages are necessarily discussed herein, andthat no particular advantage is required for all embodiments. Byutilizing the disclosed method and structure, the S-curved shape of theconductive via feature provide freedom and flexibility to land on theintended conductive contact features with enough contact areas anddistanced away from the unintended conductive contact features withenough clearance.

Thus, the present disclosure provides a method for fabricating anintegrated circuit (IC). The method includes receiving an IC layouthaving active regions, conductive contact features landing on the activeregions, and a conductive via feature to be landing on a first subset ofthe conductive contact features and to be spaced from a second subset ofthe conductive contact features; evaluating a spatial parameter of theconductive via feature to the conductive contact features; and modifyingthe IC layout according to the spatial parameter such that theconductive via feature has a S-curved shape.

The present disclosure provides a method for fabricating an integratedcircuit (IC). The method includes receiving an IC layout having a firstpattern layer, a second pattern layer, and a third pattern layer to beformed on respective material layers of a semiconductor substrate. Thefirst pattern layer includes a first active region and a second activeregion both having elongated shapes oriented in a first direction. Thesecond pattern layer includes a plurality of conductive contact featureshaving an elongated shape oriented in a second direction beingorthogonal to the first direction, wherein the conductive contactfeatures lands on the first and second active regions. The third patternlayer includes a conductive via feature landing on the conductivecontact features. The method further includes constructing an initialshape of the conductive via feature; and modifying the initial shape ofthe conductive via feature to a modified shape that is overlapped with afirst subset of the conductive contact features and is distanced from asecond subset of the conductive contact features. The modified shape hasa S-curved polygon with an edge oriented in a tilted direction beingdifferent from the first and second directions.

The present disclosure provides a method for fabricating an integratedcircuit (IC). The method includes receiving an IC layout having a firstpattern layer and a second pattern layer to be formed on respectivematerial layers of a semiconductor substrate. The first pattern layerincludes first conductive contact features and second conductive contactfeatures spaced along a first direction, each of the first and secondcontact features having an elongated shape oriented in a seconddirection orthogonal to the first direction. The second pattern layerincludes a conductive via feature to be landing on the first theconductive contact features and to be distanced away from the secondconductive contact features. The method further includes modifying theconductive via feature to a first polygon that is overlapped with thefirst conductive contact features and is distanced from the secondconductive contact features. The first polygon has an edge oriented in atilted direction being different from the first and second directions.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method for fabricating an integrated circuit(IC), comprising: receiving an IC layout having active regions,conductive contact features landing on the active regions, and aconductive via feature to be landing on a first subset of the conductivecontact features and to be spaced from a second subset of the conductivecontact features; evaluating a spatial parameter of the conductive viafeature to the conductive contact features; and modifying the IC layoutaccording to the spatial parameter such that the conductive via featurehas a S-curved shape.
 2. The method of claim 1, further comprisingforming shallow trench isolation features on the semiconductorsubstrate, thereby defining the active regions; forming the conductivecontact features landing on the active regions, respectively; andforming the conductive via feature with the S-curved shape directlylanding on the first subset of the conductive contact features.
 3. Themethod of claim 2, wherein the forming of the conductive via featurewith the S-curved shape on the semiconductor substrate includes: forminga pattern on a photomask, wherein the pattern defines the conductive viafeature with the S-curved shape; and transferring the pattern to thesemiconductor substrate by a lithography process using the photomask. 4.The method of claim 1, wherein the evaluating of the spatial parameterof the conductive via feature to the conductive contact featuresincludes evaluating an overlap area between the conductive via featureand one of the conductive contact features in the first subset; and themodifying of the IC layout includes adding a rectangle to the conductivevia feature if the overlapping area is less than an overlapping target.5. The method of claim 1, wherein the evaluating of the spatialparameter of the conductive via feature to the conductive contactfeatures includes evaluating a lateral distance between the conductivevia feature and one of the conductive contact features in a secondsubset; and the modifying of the IC layout includes abstracting arectangle from the conductive via feature if the lateral distance isless than a spacing target.
 6. The method of claim 1, wherein theconductive contact features includes a first conductive contact featureand a second conductive contact feature having elongated shapes andoriented in a first direction.
 7. The method of claim 6, furthercomprising assigning an initial shape to the conductive via feature,wherein the initial shape of the conductive via feature includes arectangle with its length extending along a second direction orthogonalto the first direction.
 8. The method of claim 7, wherein the evaluatingof the spatial parameter of the conductive via feature to the conductivecontact features includes: evaluating an overlapping area between thefirst conductive contact feature and the conductive via feature if thefirst conductive contact belongs to the first subset of the conductivecontact features; and evaluating a lateral distance between the secondconductive contact feature and the conductive via feature if the secondconductive contact feature belongs to the second subset of theconductive contact features.
 9. The method of claim 8, wherein themodifying of the IC layout includes: adding a first shape to theconductive via feature if the overlapping area is less than anoverlapping target; and abstracting a second shape from the conductivevia feature if the lateral distance is less than a spacing target. 10.The method of claim 9, wherein each of the first and second shapes is atwo-dimensional polygon chosen from square, a rectangle, a triangle, atrapezoid, a diamonds, and a parallelogram.
 11. The method of claim 10,wherein one of the first and second polygons includes an edge orientedin a third direction different from the first and second directions. 12.The method of claim 9, wherein the modifying of the IC layout includes:adding a third shape to the conductive via feature until the overlappingarea between the first conductive contact feature and the conductive viafeature meets the overlapping target; and abstracting a fourth shapefrom the conductive via feature until the lateral distance between thesecond conductive contact feature and the conductive via feature meetsthe spacing target.
 13. A method for fabricating an integrated circuit(IC), comprising: receiving an IC layout having a first pattern layer, asecond pattern layer, and a third pattern layer to be formed onrespective material layers of a semiconductor substrate, wherein thefirst pattern layer includes a first active region and a second activeregion both having elongated shapes oriented in a first direction, thesecond pattern layer includes a plurality of conductive contact featureshaving an elongated shape oriented in a second direction beingorthogonal to the first direction, wherein the conductive contactfeatures lands on the first and second active regions, and the thirdpattern layer includes a conductive via feature landing on theconductive contact features; constructing an initial shape of theconductive via feature; and modifying the initial shape of theconductive via feature to a modified shape that is overlapped with afirst subset of the conductive contact features and is distanced from asecond subset of the conductive contact features, wherein the modifiedshape has a S-curved polygon with an edge oriented in a tilted directionbeing different from the first and second directions.
 14. The method ofclaim 13, wherein the constructing of the initial shape of theconductive via feature includes constructing a first rectangle with alength and a width great enough to overlap with each of the conductivecontact features.
 15. The method of claim 14, further comprising:abstracting a second rectangle from the conductive via feature in aregion corresponding to that of a first conductive contact feature ofthe conductive contact features if the first conductive contact featurebelongs to the second subset of the conductive contact features and if alateral distance between the first conductive contact feature and theconductive via feature is less than a spacing target.
 16. The method ofclaim 13, wherein the constructing of the initial shape of theconductive via feature includes constructing a first rectangle with alength and a width such that to be distanced from each of the conductivecontact features.
 17. The method of claim 16, further comprising: addinga second rectangle to the conductive via feature in a regioncorresponding to that of a first conductive contact feature of theconductive contact features if the first conductive contact featurebelongs to the first subset of the conductive contact features and if anoverlapping area between the first conductive contact feature and theconductive via feature is less than an overlapping target.
 18. A methodfor fabricating an integrated circuit (IC), comprising: receiving an IClayout having a first pattern layer and a second pattern layer to beformed on respective material layers of a semiconductor substrate,wherein the first pattern layer includes first conductive contactfeatures and second conductive contact features spaced along a firstdirection, each of the first and second contact features having anelongated shape oriented in a second direction orthogonal to the firstdirection, and the second pattern layer includes a conductive viafeature to be landing on the first the conductive contact features andto be distanced away from the second conductive contact features; andmodifying the conductive via feature to a first polygon that isoverlapped with the first conductive contact features and is distancedfrom the second conductive contact features, wherein the first polygonhas an edge oriented in a tilted direction being different from thefirst and second directions.
 19. The method of claim 18, wherein themodifying of the conductive via feature includes: abstracting a secondpolygon from the conductive via feature if a lateral distance betweenone of the second conductive contact features and the conductive viafeature is less than a spacing target; adding a third polygon to theconductive via feature if an overlapping area between one of the firstconductive contact features and the conductive via feature is less thanan overlapping target; abstracting a fourth polygon from the conductivevia feature until the lateral distance meets the spacing target; andadding a fifth polygon to the conductive via feature until theoverlapping area meets the overlapping target.
 20. The method of claim19, the modifying of the conductive via feature includes evaluating alateral distance between each of the second conductive contact featuresand the conductive via feature, and modifying the conductive via featureuntil the corresponding lateral distance meets the spacing target; andevaluating an overlapping area between each of the first conductivecontact features and the conductive via feature, and modifying theconductive via feature until the corresponding overlapping area meetsthe overlapping target.